Specialty Gases

Cutting-edge business support across a wide range of fields

Our specialty gases are utilized in cutting-edge fields. These include semiconductor material gases, high purity gases and mixed gases.

Semiconductor material gases Recently, the ultra-high level integration of electronic circuitry is progressing, and increasingly high levels of sophistication are being demanded with respect to the quality of materials used in the manufacture of semiconductors, etc.

  • For CVD processes (monosilane, phosphine, disilane, etc.)
  • For etching (nitrogen trifluoride, chlorine trifluoride)
  • For LCDs (hydrogen iodide), etc.
High-purity gases We refine industrial gases under strict quality control procedures, compress them into containers with specially treated internal surfaces, and deliver them as highly reliable, high quality products.

  • High-purity oxygen
  • Nitrogen
  • Argon
  • Hydrogen
  • Helium
  • Carbon dioxide, etc.
Mixed gases Our mixed gases consist of various combinations of high-purity gases, and are used in a wide range of applications, including vacuum tubes/bulbs, iron ore reduction, radiation measurement, as combustion aids, and in lasers.
Standard gases Analyzers are used in process control for petrochemical and iron/steel industry applications, and in the analysis of vehicle exhaust gases and other environmental-related measurements. The reliability of these measuring devices is increased through calibration and span checks using high-purity standard gases.
Rare gases Neon, krypton, xenon

  • For vacuum tubes/bulbs
  • For PDP (plasma display panel) light sources
  • For laser oscillators